AXCELIS ANNOUNCES MULTIPLE PURION M SHIPMENTS ON FOLLOW-ON ORDERS AND NEW EVALUATION TOOL PLACEMENT

Published: Jan. 20, 2022 at 8:00 AM EST

BEVERLY, Mass., Jan. 20, 2022 /PRNewswire/ --  Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today multiple shipments of Purion M medium current implanters to mature process technology device makers. Additionally a new Purion M evaluation tool shipped to a memory device maker. The systems shipped on various dates in the fourth quarter of 2021 and the first quarter of 2022.  

Axcelis Technologies, Inc. (PRNewsFoto/Axcelis Technologies, Inc.) (PRNewsFoto/)
Axcelis Technologies, Inc. (PRNewsFoto/Axcelis Technologies, Inc.) (PRNewsFoto/)

Executive Vice President of Product Development, Bill Bintz, commented, "We're very pleased to announce these new wins for the Purion M platform, supporting a strong start to 2022. They provide additional evidence of continued Purion M strength in the memory and mature process technology markets. Our Purion M ion implanters are designed to address the diverse requirements of our customers offering unparalleled flexibility to meet today's evolving implant requirements. Strong adoption of the complete Purion platform across these robust market segments continues to be a key driver of our growth."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS: 
Maureen Hart (editorial/media) 978.787.4266 
Doug Lawson (investor relations) 978.787.9552

Axcelis announced multiple shipments of Purion M medium current implanters a new Purion M evaluation tool 

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SOURCE Axcelis Technologies, Inc.

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