BEVERLY, Mass., Jan. 20, 2022 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today multiple shipments of Purion M medium current implanters to mature process technology device makers. Additionally a new Purion M evaluation tool shipped to a memory device maker. The systems shipped on various dates in the fourth quarter of 2021 and the first quarter of 2022.
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SOURCE Axcelis Technologies, Inc.